@inproceedings{2756f475853b4f0c96c29c1bb7c75638,
title = "A Novel Three-Dimensional Submicron ZnO Inverter Technology with Refined Contact Design",
abstract = "Impact of source/drain contacts on the operation performance of three-dimensional (3-D) zinc-oxide (ZnO) logic inverters is explored in this work. The 3-D inverters consisting of a load vertically stacking on a driver were constructed with the film-profile-engineered (FPE) approach. Use of an ultra-thin ZnON contact layer is proposed and demonstrated to be effective in reducing the source/drain (S/D) series resistances (RSD) of the devices. From the material characterization, the improvement in the electrical characteristics is attributed to the suppression of an insulating interfacial oxide layer present at the contact interface which may impede the carrier transport. Measurement results of inverters indicate that the voltage gain can be improved from 9.7 V/V to 13.2 V/V as the scheme is implemented.",
keywords = "Film profile engineering (FPE), inverter, oxide semiconductor, thin-film transistors (TFTs), voltage gain, zinc oxynitride (ZnON), zinc-oxide (ZnO)",
author = "Lin, {Horng Chih} and Kuan, {Chin I.}",
year = "2019",
month = jun,
doi = "10.1109/ICICDT.2019.8790882",
language = "English",
series = "17th IEEE International Conference on IC Design and Technology, ICICDT 2019 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "17th IEEE International Conference on IC Design and Technology, ICICDT 2019 - Proceedings",
address = "美國",
note = "17th IEEE International Conference on IC Design and Technology, ICICDT 2019 ; Conference date: 17-06-2019 Through 19-06-2019",
}