A novel thermal switch design by using CMOS MEMS fabrication process

Lei Chun Chou*, You Liang Lai, Ying Zong Juang, Chun Yin Tsai, Chun Ying Lin, Sheng-Chieh Huang, Jin-Chern Chiou

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Material Science

Engineering

Chemical Engineering