A novel suspension design for MEMS sensing device to eliminate planar spring constants mismatch

Kai Yu Jiang^*, He Ling Chen, Wen-Syang Hsu, Yueh Kang Lee, Yen Wu Miao, Yi Chueh Shieh, Chen Yuan Hung

^*Corresponding author for this work

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Keyphrases

Engineering