A novel suspension design for MEMS sensing device to eliminate planar spring constants mismatch

Kai Yu Jiang; He Ling Chen; Wen-Syang Hsu; Yueh Kang Lee; Yen Wu Miao; Yi Chueh Shieh; Chen Yuan Hung

doi:10.1109/ICSENS.2012.6411145

A novel suspension design for MEMS sensing device to eliminate planar spring constants mismatch

Kai Yu Jiang^*, He Ling Chen, Wen-Syang Hsu, Yueh Kang Lee, Yen Wu Miao, Yi Chueh Shieh, Chen Yuan Hung

^*Corresponding author for this work

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

This paper presents a new suspension design for planar MEMS sensing devices. The new design includes four coil springs which are symmetrically arranged with respect to the center of the proof mass with 90-degree orientation difference. The proposed coil spring design is found to take less area to achieve similar spring constant than the conventional serpentine spring design. Furthermore, the proposed symmetrical-to-center arrangement on suspension can reduce spring constants mismatch between X and Y axes, even under beam width deviation due to fabrication resolution. This concept is realized and verified by experimental results from two-axis capacitive accelerometers through a polysilicon-based CMOS fabrication platform.

Original language	English
Title of host publication	IEEE SENSORS 2012 - Proceedings
DOIs	https://doi.org/10.1109/ICSENS.2012.6411145
State	Published - 1 Dec 2012
Event	11th IEEE SENSORS 2012 Conference - Taipei, Taiwan Duration: 28 Oct 2012 → 31 Oct 2012

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	11th IEEE SENSORS 2012 Conference
Country/Territory	Taiwan
City	Taipei
Period	28/10/12 → 31/10/12

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10.1109/ICSENS.2012.6411145

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title = "A novel suspension design for MEMS sensing device to eliminate planar spring constants mismatch",

abstract = "This paper presents a new suspension design for planar MEMS sensing devices. The new design includes four coil springs which are symmetrically arranged with respect to the center of the proof mass with 90-degree orientation difference. The proposed coil spring design is found to take less area to achieve similar spring constant than the conventional serpentine spring design. Furthermore, the proposed symmetrical-to-center arrangement on suspension can reduce spring constants mismatch between X and Y axes, even under beam width deviation due to fabrication resolution. This concept is realized and verified by experimental results from two-axis capacitive accelerometers through a polysilicon-based CMOS fabrication platform.",

author = "Jiang, {Kai Yu} and Chen, {He Ling} and Wen-Syang Hsu and Lee, {Yueh Kang} and Miao, {Yen Wu} and Shieh, {Yi Chueh} and Hung, {Chen Yuan}",

year = "2012",

month = dec,

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doi = "10.1109/ICSENS.2012.6411145",

language = "English",

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AU - Jiang, Kai Yu

AU - Chen, He Ling

AU - Hsu, Wen-Syang

AU - Lee, Yueh Kang

AU - Miao, Yen Wu

AU - Shieh, Yi Chueh

AU - Hung, Chen Yuan

PY - 2012/12/1

Y1 - 2012/12/1

N2 - This paper presents a new suspension design for planar MEMS sensing devices. The new design includes four coil springs which are symmetrically arranged with respect to the center of the proof mass with 90-degree orientation difference. The proposed coil spring design is found to take less area to achieve similar spring constant than the conventional serpentine spring design. Furthermore, the proposed symmetrical-to-center arrangement on suspension can reduce spring constants mismatch between X and Y axes, even under beam width deviation due to fabrication resolution. This concept is realized and verified by experimental results from two-axis capacitive accelerometers through a polysilicon-based CMOS fabrication platform.

AB - This paper presents a new suspension design for planar MEMS sensing devices. The new design includes four coil springs which are symmetrically arranged with respect to the center of the proof mass with 90-degree orientation difference. The proposed coil spring design is found to take less area to achieve similar spring constant than the conventional serpentine spring design. Furthermore, the proposed symmetrical-to-center arrangement on suspension can reduce spring constants mismatch between X and Y axes, even under beam width deviation due to fabrication resolution. This concept is realized and verified by experimental results from two-axis capacitive accelerometers through a polysilicon-based CMOS fabrication platform.

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U2 - 10.1109/ICSENS.2012.6411145

DO - 10.1109/ICSENS.2012.6411145

M3 - Conference contribution

AN - SCOPUS:84873944186

SN - 9781457717659

T3 - Proceedings of IEEE Sensors

BT - IEEE SENSORS 2012 - Proceedings

T2 - 11th IEEE SENSORS 2012 Conference

Y2 - 28 October 2012 through 31 October 2012

ER -

A novel suspension design for MEMS sensing device to eliminate planar spring constants mismatch

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