A novel self-aligned process between a nano-aperture and a solid immersion lens for a near-field optical system

Keyphrases

• Self-aligned Process 100%
• Optical System 100%
• Nanoaperture 100%
• Solid Immersion Lens 100%
• Near-field Optical 100%
• Alignment Method 20%
• Self-alignment Technique 20%
• Reflowing 20%
• Circular Aperture 20%
• Beam System 10%
• Focused Ion Beam 10%
• Popular 10%
• Surface Tension 10%
• Spot Size 10%
• Diffraction Limit 10%
• Fabrication Methods 10%
• Maximum Deviation 10%
• Nanosize 10%
• High-throughput 10%
• Transmission Efficiency 10%
• Modulation Techniques 10%
• Ultra-high Resolution 10%
• Self-modulation 10%
• Self-alignment 10%
• Time Enhancement 10%
• Value Sensitive Design 10%
• Backside Exposure 10%

Engineering

• Optical Systems 100%
• Circular Aperture 100%
• High Resolution 50%
• Diffraction Limit 50%
• Spot Size 50%
• Modulation Technique 50%
• Focused Ion Beam 50%
• Beam System 50%