A novel planarization of oxide-filled shallow-trench isolation

Juing Yi Cheng*, Tan Fu Lei, Tien-Sheng Chao, Daniel L.W. Yen, B. J. Jin, C. J. Lin

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Fingerprint

Dive into the research topics of 'A novel planarization of oxide-filled shallow-trench isolation'. Together they form a unique fingerprint.

Keyphrases

Engineering