TY - GEN
T1 - A new high voltage IC with robust isolation design
AU - Ningaraju, Vivek
AU - Lin, Horng-Chih
AU - Chen, Po An
AU - Wen, Jiin Shiarng
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/7/3
Y1 - 2018/7/3
N2 - A new and robust isolation design for control devices integrated in the high side island region of 250V high-voltage integrated circuits (HVIC) is proposed and verified by numerical calculations, simulations and experiments. The new isolation structure can be realized using micro N-well in the P-type isolation region to achieve a higher breakdown voltage (BV). The measurement and TCAD simulation results prove this new isolation structure's BV is over 350V with negligible leakage current. In the proposed scheme BV is improved by 15% more than the conventional structure without adding additional process steps and photo layers.
AB - A new and robust isolation design for control devices integrated in the high side island region of 250V high-voltage integrated circuits (HVIC) is proposed and verified by numerical calculations, simulations and experiments. The new isolation structure can be realized using micro N-well in the P-type isolation region to achieve a higher breakdown voltage (BV). The measurement and TCAD simulation results prove this new isolation structure's BV is over 350V with negligible leakage current. In the proposed scheme BV is improved by 15% more than the conventional structure without adding additional process steps and photo layers.
UR - https://www.scopus.com/pages/publications/85050462937
U2 - 10.1109/VLSI-TSA.2018.8403845
DO - 10.1109/VLSI-TSA.2018.8403845
M3 - Conference contribution
AN - SCOPUS:85050462937
T3 - 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018
SP - 1
EP - 2
BT - 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018
Y2 - 16 April 2018 through 19 April 2018
ER -