TY - GEN
T1 - A new design of 3-DOF flexure-mechanism positioner with electromagnetic technology
AU - Wu, Zhao Kai
AU - Chen, Mei Yung
AU - Hung, Shao-Kang
AU - Huang, Sheng-Chieh
AU - Fu, Li Chen
PY - 2006/12/1
Y1 - 2006/12/1
N2 - In this paper, We present the design, control and implementation of a novel, compact and three degree-offreedom (DOF) precise flexure-mechanism electromagnetic-actuating positioning system with submocrometer-scale precise positioning capability and millimeter-level large travel range. The design of the positioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and the eddy-current sensors to achieve the 3-DOF motion. The positioner presented herein shows the planar travel range of 1mm×1mm with a position resolution of ±300 nm. To let the compact system be more robust and stable in positioning, we propose an adaptive sliding-mode controller. We will demonstrate the satisfactory performance of the positioning system, including stiffness and precision, with theoretical analysis and experimental results.
AB - In this paper, We present the design, control and implementation of a novel, compact and three degree-offreedom (DOF) precise flexure-mechanism electromagnetic-actuating positioning system with submocrometer-scale precise positioning capability and millimeter-level large travel range. The design of the positioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and the eddy-current sensors to achieve the 3-DOF motion. The positioner presented herein shows the planar travel range of 1mm×1mm with a position resolution of ±300 nm. To let the compact system be more robust and stable in positioning, we propose an adaptive sliding-mode controller. We will demonstrate the satisfactory performance of the positioning system, including stiffness and precision, with theoretical analysis and experimental results.
KW - Adaptive controller
KW - Parallel flexure mechanism
KW - Positioner
KW - Precision positioning
UR - http://www.scopus.com/inward/record.url?scp=39649092974&partnerID=8YFLogxK
U2 - 10.1109/CDC.2006.377024
DO - 10.1109/CDC.2006.377024
M3 - Conference contribution
AN - SCOPUS:39649092974
SN - 1424401712
SN - 9781424401710
T3 - Proceedings of the IEEE Conference on Decision and Control
SP - 603
EP - 608
BT - Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC
T2 - 45th IEEE Conference on Decision and Control 2006, CDC
Y2 - 13 December 2006 through 15 December 2006
ER -