A new and simple DC method for thermal-resistance extraction of scaled FinFET devices

Keyphrases

• FinFET Devices 100%
• Thermal Resistance 100%
• Resistance Extraction 100%
• DC Method 100%
• Chuck 50%
• Temperature Rise 50%
• Fin Field-effect Transistor (FinFET) 50%
• Transconductance 50%
• Drain Resistance 50%
• Self-heating 50%
• Temperature Sensor 50%
• DC Measurements 50%
• Device Temperature 50%
• Measurement Method 50%
• Resistance Effect 50%
• Special Tests 50%

Engineering

• Heat Resistance 100%
• Test Structure 50%
• Temperature Rise 50%
• Thermal Sensor 50%
• Isolation Method 50%