A monolithic CMOS/MEMS accelerometer with zero-g calibration readout circuit

Yu Sian Liu, Chien Jo Huang, Fu Yen Kuo, Kuei-Ann Wen, Long Sheng Fan

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    2 Scopus citations

    Abstract

    A monolithic accelerometer design with zero-g calibration with TSMC 0.18 μm mixed-signal 1P6M process is presented. On-chip digital offset calibration enables compensation of random mechanical offset in the sensor due to process variation. The maximum 21 fF capacitance mismatch can be calibrated. The simulation results show that the whole system have 452.1 mV/g sensitivity. The power consumption is about 1.16 mW. The output noise is 26.85 μg/√Hz at 1KHz.

    Original languageEnglish
    Title of host publicationIEEE EuroCon 2013
    Pages2106-2110
    Number of pages5
    DOIs
    StatePublished - 4 Dec 2013
    EventIEEE EuroCon 2013 - Zagreb, Croatia
    Duration: 1 Jul 20134 Jul 2013

    Publication series

    NameIEEE EuroCon 2013

    Conference

    ConferenceIEEE EuroCon 2013
    Country/TerritoryCroatia
    CityZagreb
    Period1/07/134/07/13

    Keywords

    • Accelerometer capacitive readout
    • Offset calibration
    • Readout circuit
    • Zero-g calibration

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