A low temperature fabrication of Hf O2 films with supercritical C O2 fluid treatment
- Chih Tsung Tsai*
- , Ting Chang Chang
- , Kon Tsu Kin
- , Po-Tsun Liu
- , Po Yu Yang
- , Chi Feng Weng
- , Fon Shan Huang
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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