A Low-Power Sensing System of VEGF Concentration with Monolithic Electrodes and An All-Digital Sub-Sampling Delay-Locked Loop

Tsung Wen Sun; Ren Wei Cheng; Tsung Heng Tsai

doi:10.1109/BioCAS54905.2022.9948620

A Low-Power Sensing System of VEGF Concentration with Monolithic Electrodes and An All-Digital Sub-Sampling Delay-Locked Loop

Tsung Wen Sun
, Ren Wei Cheng
, Tsung Heng Tsai^*

^*Corresponding author for this work

Institute of Pioneer Semiconductor Innovation

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

The CMOS MEMS capacitive transducer is integrated on the same chip for the point-of-care (PoC) applications. A low-noise sensing system using the sub-sampling technique to suppress the interface noise is presented. The biomarker is vascular endothelial growth factor (VEGF). The proposed sensing system converts the capacitance variations caused by the VEGF concentration at the transducer into digital codes with a low-power SAR-assisted time-to-digital converter (TDC). CMOS MEMS interdigitated electrodes are adopted as the transducer. Post-process etching and Au plating are applied on the surface of the electrodes. Experimental results show that a capacitive resolution of 28.3 fF and a sensing range of VEGF concentration from 1 to 1000 pg/ml are achieved. The power consumption of the sensing front-end is 18 μW and overall sensing system is merely 60.65 μW. The FOM of the proposed low-power VEGF sensing system is 587.8 pJ/conv.-step.

Original language	English
Title of host publication	BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference
Subtitle of host publication	Intelligent Biomedical Systems for a Better Future, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	331-334
Number of pages	4
ISBN (Electronic)	9781665469173
DOIs	https://doi.org/10.1109/BioCAS54905.2022.9948620
State	Published - 2022
Event	2022 IEEE Biomedical Circuits and Systems Conference, BioCAS 2022 - Taipei, Taiwan Duration: 13 Oct 2022 → 15 Oct 2022

Publication series

Name	BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings

Conference

Conference	2022 IEEE Biomedical Circuits and Systems Conference, BioCAS 2022
Country/Territory	Taiwan
City	Taipei
Period	13/10/22 → 15/10/22

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Keywords

Cancer Diagnosis
Capacitive transducer
Delay lock loop (DLL)
Gold Interdigitated electrode
Time-to-digital converter (TDC)
Vascular Endothelial Growth Factor (VEGF)

Access to Document

10.1109/BioCAS54905.2022.9948620

Cite this

Sun, T. W., Cheng, R. W., & Tsai, T. H. (2022). A Low-Power Sensing System of VEGF Concentration with Monolithic Electrodes and An All-Digital Sub-Sampling Delay-Locked Loop. In BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings (pp. 331-334). (BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/BioCAS54905.2022.9948620

Sun, Tsung Wen ; Cheng, Ren Wei ; Tsai, Tsung Heng. / A Low-Power Sensing System of VEGF Concentration with Monolithic Electrodes and An All-Digital Sub-Sampling Delay-Locked Loop. BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. pp. 331-334 (BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings).

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title = "A Low-Power Sensing System of VEGF Concentration with Monolithic Electrodes and An All-Digital Sub-Sampling Delay-Locked Loop",

abstract = "The CMOS MEMS capacitive transducer is integrated on the same chip for the point-of-care (PoC) applications. A low-noise sensing system using the sub-sampling technique to suppress the interface noise is presented. The biomarker is vascular endothelial growth factor (VEGF). The proposed sensing system converts the capacitance variations caused by the VEGF concentration at the transducer into digital codes with a low-power SAR-assisted time-to-digital converter (TDC). CMOS MEMS interdigitated electrodes are adopted as the transducer. Post-process etching and Au plating are applied on the surface of the electrodes. Experimental results show that a capacitive resolution of 28.3 fF and a sensing range of VEGF concentration from 1 to 1000 pg/ml are achieved. The power consumption of the sensing front-end is 18 μW and overall sensing system is merely 60.65 μW. The FOM of the proposed low-power VEGF sensing system is 587.8 pJ/conv.-step.",

keywords = "Cancer Diagnosis, Capacitive transducer, Delay lock loop (DLL), Gold Interdigitated electrode, Time-to-digital converter (TDC), Vascular Endothelial Growth Factor (VEGF)",

author = "Sun, \{Tsung Wen\} and Cheng, \{Ren Wei\} and Tsai, \{Tsung Heng\}",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE Biomedical Circuits and Systems Conference, BioCAS 2022 ; Conference date: 13-10-2022 Through 15-10-2022",

year = "2022",

doi = "10.1109/BioCAS54905.2022.9948620",

language = "English",

series = "BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings",

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}

Sun, TW, Cheng, RW & Tsai, TH 2022, A Low-Power Sensing System of VEGF Concentration with Monolithic Electrodes and An All-Digital Sub-Sampling Delay-Locked Loop. in BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings. BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 331-334, 2022 IEEE Biomedical Circuits and Systems Conference, BioCAS 2022, Taipei, Taiwan, 13/10/22. https://doi.org/10.1109/BioCAS54905.2022.9948620

A Low-Power Sensing System of VEGF Concentration with Monolithic Electrodes and An All-Digital Sub-Sampling Delay-Locked Loop. / Sun, Tsung Wen; Cheng, Ren Wei; Tsai, Tsung Heng.
BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. p. 331-334 (BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A Low-Power Sensing System of VEGF Concentration with Monolithic Electrodes and An All-Digital Sub-Sampling Delay-Locked Loop

AU - Sun, Tsung Wen

AU - Cheng, Ren Wei

AU - Tsai, Tsung Heng

PY - 2022

Y1 - 2022

N2 - The CMOS MEMS capacitive transducer is integrated on the same chip for the point-of-care (PoC) applications. A low-noise sensing system using the sub-sampling technique to suppress the interface noise is presented. The biomarker is vascular endothelial growth factor (VEGF). The proposed sensing system converts the capacitance variations caused by the VEGF concentration at the transducer into digital codes with a low-power SAR-assisted time-to-digital converter (TDC). CMOS MEMS interdigitated electrodes are adopted as the transducer. Post-process etching and Au plating are applied on the surface of the electrodes. Experimental results show that a capacitive resolution of 28.3 fF and a sensing range of VEGF concentration from 1 to 1000 pg/ml are achieved. The power consumption of the sensing front-end is 18 μW and overall sensing system is merely 60.65 μW. The FOM of the proposed low-power VEGF sensing system is 587.8 pJ/conv.-step.

AB - The CMOS MEMS capacitive transducer is integrated on the same chip for the point-of-care (PoC) applications. A low-noise sensing system using the sub-sampling technique to suppress the interface noise is presented. The biomarker is vascular endothelial growth factor (VEGF). The proposed sensing system converts the capacitance variations caused by the VEGF concentration at the transducer into digital codes with a low-power SAR-assisted time-to-digital converter (TDC). CMOS MEMS interdigitated electrodes are adopted as the transducer. Post-process etching and Au plating are applied on the surface of the electrodes. Experimental results show that a capacitive resolution of 28.3 fF and a sensing range of VEGF concentration from 1 to 1000 pg/ml are achieved. The power consumption of the sensing front-end is 18 μW and overall sensing system is merely 60.65 μW. The FOM of the proposed low-power VEGF sensing system is 587.8 pJ/conv.-step.

KW - Cancer Diagnosis

KW - Capacitive transducer

KW - Delay lock loop (DLL)

KW - Gold Interdigitated electrode

KW - Time-to-digital converter (TDC)

KW - Vascular Endothelial Growth Factor (VEGF)

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U2 - 10.1109/BioCAS54905.2022.9948620

DO - 10.1109/BioCAS54905.2022.9948620

M3 - Conference contribution

AN - SCOPUS:85142922133

T3 - BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings

SP - 331

EP - 334

BT - BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2022 IEEE Biomedical Circuits and Systems Conference, BioCAS 2022

Y2 - 13 October 2022 through 15 October 2022

ER -

Sun TW, Cheng RW, Tsai TH. A Low-Power Sensing System of VEGF Concentration with Monolithic Electrodes and An All-Digital Sub-Sampling Delay-Locked Loop. In BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2022. p. 331-334. (BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings). doi: 10.1109/BioCAS54905.2022.9948620

A Low-Power Sensing System of VEGF Concentration with Monolithic Electrodes and An All-Digital Sub-Sampling Delay-Locked Loop

Abstract

Publication series

Conference

UN SDGs

Keywords

Access to Document

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