A Low-Power Sensing System of VEGF Concentration with Monolithic Electrodes and An All-Digital Sub-Sampling Delay-Locked Loop

Tsung Wen Sun, Ren Wei Cheng, Tsung Heng Tsai*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

The CMOS MEMS capacitive transducer is integrated on the same chip for the point-of-care (PoC) applications. A low-noise sensing system using the sub-sampling technique to suppress the interface noise is presented. The biomarker is vascular endothelial growth factor (VEGF). The proposed sensing system converts the capacitance variations caused by the VEGF concentration at the transducer into digital codes with a low-power SAR-assisted time-to-digital converter (TDC). CMOS MEMS interdigitated electrodes are adopted as the transducer. Post-process etching and Au plating are applied on the surface of the electrodes. Experimental results show that a capacitive resolution of 28.3 fF and a sensing range of VEGF concentration from 1 to 1000 pg/ml are achieved. The power consumption of the sensing front-end is 18 μW and overall sensing system is merely 60.65 μW. The FOM of the proposed low-power VEGF sensing system is 587.8 pJ/conv.-step.

Original languageEnglish
Title of host publicationBioCAS 2022 - IEEE Biomedical Circuits and Systems Conference
Subtitle of host publicationIntelligent Biomedical Systems for a Better Future, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages331-334
Number of pages4
ISBN (Electronic)9781665469173
DOIs
StatePublished - 2022
Event2022 IEEE Biomedical Circuits and Systems Conference, BioCAS 2022 - Taipei, Taiwan
Duration: 13 Oct 202215 Oct 2022

Publication series

NameBioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings

Conference

Conference2022 IEEE Biomedical Circuits and Systems Conference, BioCAS 2022
Country/TerritoryTaiwan
CityTaipei
Period13/10/2215/10/22

Keywords

  • Cancer Diagnosis
  • Capacitive transducer
  • Delay lock loop (DLL)
  • Gold Interdigitated electrode
  • Time-to-digital converter (TDC)
  • Vascular Endothelial Growth Factor (VEGF)

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