A low power reconfigurable SAR ADC for CMOS MEMS sensor

Hao Min Lin, Kuei-Ann Wen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    5 Scopus citations

    Abstract

    This paper presents a reconfigurable successive approximation register (SAR) Analog-to-Digital Converter (ADC) of which the resolution can be scaled from 9 to 12 bits for various inertial MEMS sensor applications. The dual supply voltage skill separating digital and analog voltage is implemented for achieving low power consumption. In addition, level shifter connects the interface between digital and analog domain. 3 bit segmented capacitor array are used to decrease the static error and glitches from MSB switching. In the provided 9 to 12 bits mode, this structure consumes 2.5, 2.8, 3.9 and 9.7 μW and achieve 52.3, 57.7, 63.2 and 68.6 SNDR respectively, resulting in figure of merit (FoM) 148, 88.8, 66.3 and 88.4fJ/conversion-step.

    Original languageEnglish
    Title of host publicationProceedings - International SoC Design Conference 2017, ISOCC 2017
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages7-8
    Number of pages2
    ISBN (Electronic)9781538622858
    DOIs
    StatePublished - 29 May 2018
    Event14th International SoC Design Conference, ISOCC 2017 - Seoul, Korea, Republic of
    Duration: 5 Nov 20178 Nov 2017

    Publication series

    NameProceedings - International SoC Design Conference 2017, ISOCC 2017

    Conference

    Conference14th International SoC Design Conference, ISOCC 2017
    Country/TerritoryKorea, Republic of
    CitySeoul
    Period5/11/178/11/17

    Keywords

    • Dual voltage
    • MEMS sensor
    • SAR ADC
    • Scaled resolution
    • Segmented capacitor array

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