A Low-Cost Passivation for Low Temperature Cu-Cu Bonding Using PVD-Deposited Cu3N

Tzu Heng Hung, Ping Jung Liu, Chiao Yen Wang, Tsai Fu Chung, Kuan Neng Chen*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

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Engineering

Material Science