TY - GEN
T1 - A generalized foundry CMOS platform for capacitively-transduced resonators monolithically integrated with amplifiers
AU - Chen, Wen Chien
AU - Chen, Che Sheng
AU - Wen, Kuei-Ann
AU - Fan, Long Sheng
AU - Fang, Weileun
AU - Li, Sheng Shian
PY - 2010
Y1 - 2010
N2 - A generalized foundry CMOS-MEMS platform suited for integrated micromechanical resonator circuits have been developed for commercial multi-user purpose and demonstrated with a fast turnaround time and a variety of design flexibilities for resonator applications. With this platform, different configurations of capacitively-transduced resonators monolithically integrated with their associated amplifier circuits, spanning frequencies from 500kHz to 14.5MHz, have been realized with resonator Q's around 2,000. This platform specifically featured with various configurations of structural materials, different arrangements of mechanical boundary conditions, large transduction area, well-defined anchors, and performance enhancement scaling with IC fabrication technology, offers a variety of flexible design options suited for sensor and RF applications.
AB - A generalized foundry CMOS-MEMS platform suited for integrated micromechanical resonator circuits have been developed for commercial multi-user purpose and demonstrated with a fast turnaround time and a variety of design flexibilities for resonator applications. With this platform, different configurations of capacitively-transduced resonators monolithically integrated with their associated amplifier circuits, spanning frequencies from 500kHz to 14.5MHz, have been realized with resonator Q's around 2,000. This platform specifically featured with various configurations of structural materials, different arrangements of mechanical boundary conditions, large transduction area, well-defined anchors, and performance enhancement scaling with IC fabrication technology, offers a variety of flexible design options suited for sensor and RF applications.
UR - http://www.scopus.com/inward/record.url?scp=77952770590&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2010.5442531
DO - 10.1109/MEMSYS.2010.5442531
M3 - Conference contribution
AN - SCOPUS:77952770590
SN - 9781424457649
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 204
EP - 207
BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Y2 - 24 January 2010 through 28 January 2010
ER -