A gasket-type standard leak element using femtosecond laser micromachining

Chi-Hin Chan; Chien-Ming Tu; S. D. Yeh; C. C. Chang; T. C. Lin; Chih-Wei Luo; Ching-Shiang Hwang

doi:10.1016/j.vacuum.2020.109650

A gasket-type standard leak element using femtosecond laser micromachining

Chi-Hin Chan^*, Chien-Ming Tu, S. D. Yeh, C. C. Chang, T. C. Lin, Chih-Wei Luo, Ching-Shiang Hwang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

A gasket-type standard leak element with a microfluidic channel was developed and measured. The microfluidic channel with a diameter of several micrometers and a length of one hundred micrometers was fabricated by using femtosecond laser micromachining. The conductances (

Original language	English
Article number	109650
Number of pages	6
Journal	Vacuum
Volume	180
DOIs	https://doi.org/10.1016/j.vacuum.2020.109650
State	Published - Oct 2020

Keywords

Leak element
Femtosecond laser ablation
Molecular flow conductance
Microfluidic
IN-SITU CALIBRATION
IONIZATION GAUGES
SENSITIVITIES
HOLES

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10.1016/j.vacuum.2020.109650

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title = "A gasket-type standard leak element using femtosecond laser micromachining",

abstract = "A gasket-type standard leak element with a microfluidic channel was developed and measured. The microfluidic channel with a diameter of several micrometers and a length of one hundred micrometers was fabricated by using femtosecond laser micromachining. The conductances (",

keywords = "Leak element, Femtosecond laser ablation, Molecular flow conductance, Microfluidic, IN-SITU CALIBRATION, IONIZATION GAUGES, SENSITIVITIES, HOLES",

author = "Chi-Hin Chan and Chien-Ming Tu and Yeh, {S. D.} and Chang, {C. C.} and Lin, {T. C.} and Chih-Wei Luo and Ching-Shiang Hwang",

year = "2020",

month = oct,

doi = "10.1016/j.vacuum.2020.109650",

language = "English",

volume = "180",

journal = "Vacuum",

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AU - Chan, Chi-Hin

AU - Tu, Chien-Ming

AU - Yeh, S. D.

AU - Chang, C. C.

AU - Lin, T. C.

AU - Luo, Chih-Wei

AU - Hwang, Ching-Shiang

PY - 2020/10

Y1 - 2020/10

N2 - A gasket-type standard leak element with a microfluidic channel was developed and measured. The microfluidic channel with a diameter of several micrometers and a length of one hundred micrometers was fabricated by using femtosecond laser micromachining. The conductances (

AB - A gasket-type standard leak element with a microfluidic channel was developed and measured. The microfluidic channel with a diameter of several micrometers and a length of one hundred micrometers was fabricated by using femtosecond laser micromachining. The conductances (

KW - Leak element

KW - Femtosecond laser ablation

KW - Molecular flow conductance

KW - Microfluidic

KW - IN-SITU CALIBRATION

KW - IONIZATION GAUGES

KW - SENSITIVITIES

KW - HOLES

U2 - 10.1016/j.vacuum.2020.109650

DO - 10.1016/j.vacuum.2020.109650

M3 - Article

SN - 0042-207X

VL - 180

JO - Vacuum

JF - Vacuum

M1 - 109650

ER -

A gasket-type standard leak element using femtosecond laser micromachining

Abstract

Keywords

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