A decouple structured gyroscope with integrated readout circuit on standard 0.18jim 1P6M CMOS Technolo

Chun Lin Chien; Kuei-Ann Wen

doi:10.1109/ISOCC.2016.7799718

A decouple structured gyroscope with integrated readout circuit on standard 0.18jim 1P6M CMOS Technolo

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A dual proof-mass structured gyroscope integrated with readout circuit have been proposed. The C to V stage is achieved by the differential difference amplifier (DDA) which has advantages of high gain, low temperature and process dependence. Chopper Stabilization (CHS) and Corrected Double Sampling (CDS) Ls used to suppress low-frequency noise and compensate DC offset. The gain of DDA is 25dB and power consumption of total readout circuit is 791μW. The mems part is fabricated with standard 1P6M 0.18um CMOS process and the mechanical sensitivity is 11.26aF/°/s. Chip area is 1.9xl.7mm².

Original language	English
Title of host publication	ISOCC 2016 - International SoC Design Conference
Subtitle of host publication	Smart SoC for Intelligent Things
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	15-16
Number of pages	2
ISBN (Electronic)	9781467393089
DOIs	https://doi.org/10.1109/ISOCC.2016.7799718
State	Published - 27 Dec 2016
Event	13th International SoC Design Conference, ISOCC 2016 - Jeju, Korea, Republic of Duration: 23 Oct 2016 → 26 Oct 2016

Publication series

Name	ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things

Conference

Conference	13th International SoC Design Conference, ISOCC 2016
Country/Territory	Korea, Republic of
City	Jeju
Period	23/10/16 → 26/10/16

Keywords

Capacithe sensing
CMOS-MEMS
Gyroscope
Readout circuit

Access to Document

10.1109/ISOCC.2016.7799718

Cite this

Chien, C. L., & Wen, K.-A. (2016). A decouple structured gyroscope with integrated readout circuit on standard 0.18jim 1P6M CMOS Technolo. In ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things (pp. 15-16). Article 7799718 (ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISOCC.2016.7799718

Chien, Chun Lin ; Wen, Kuei-Ann. / A decouple structured gyroscope with integrated readout circuit on standard 0.18jim 1P6M CMOS Technolo. ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 15-16 (ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things).

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title = "A decouple structured gyroscope with integrated readout circuit on standard 0.18jim 1P6M CMOS Technolo",

abstract = "A dual proof-mass structured gyroscope integrated with readout circuit have been proposed. The C to V stage is achieved by the differential difference amplifier (DDA) which has advantages of high gain, low temperature and process dependence. Chopper Stabilization (CHS) and Corrected Double Sampling (CDS) Ls used to suppress low-frequency noise and compensate DC offset. The gain of DDA is 25dB and power consumption of total readout circuit is 791μW. The mems part is fabricated with standard 1P6M 0.18um CMOS process and the mechanical sensitivity is 11.26aF/°/s. Chip area is 1.9xl.7mm2.",

keywords = "Capacithe sensing, CMOS-MEMS, Gyroscope, Readout circuit",

author = "Chien, {Chun Lin} and Kuei-Ann Wen",

year = "2016",

month = dec,

day = "27",

doi = "10.1109/ISOCC.2016.7799718",

language = "English",

series = "ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "15--16",

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note = "13th International SoC Design Conference, ISOCC 2016 ; Conference date: 23-10-2016 Through 26-10-2016",

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Chien, CL & Wen, K-A 2016, A decouple structured gyroscope with integrated readout circuit on standard 0.18jim 1P6M CMOS Technolo. in ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things., 7799718, ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things, Institute of Electrical and Electronics Engineers Inc., pp. 15-16, 13th International SoC Design Conference, ISOCC 2016, Jeju, Korea, Republic of, 23/10/16. https://doi.org/10.1109/ISOCC.2016.7799718

A decouple structured gyroscope with integrated readout circuit on standard 0.18jim 1P6M CMOS Technolo. / Chien, Chun Lin; Wen, Kuei-Ann.
ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things. Institute of Electrical and Electronics Engineers Inc., 2016. p. 15-16 7799718 (ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - A dual proof-mass structured gyroscope integrated with readout circuit have been proposed. The C to V stage is achieved by the differential difference amplifier (DDA) which has advantages of high gain, low temperature and process dependence. Chopper Stabilization (CHS) and Corrected Double Sampling (CDS) Ls used to suppress low-frequency noise and compensate DC offset. The gain of DDA is 25dB and power consumption of total readout circuit is 791μW. The mems part is fabricated with standard 1P6M 0.18um CMOS process and the mechanical sensitivity is 11.26aF/°/s. Chip area is 1.9xl.7mm2.

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KW - Readout circuit

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Chien CL, Wen KA. A decouple structured gyroscope with integrated readout circuit on standard 0.18jim 1P6M CMOS Technolo. In ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things. Institute of Electrical and Electronics Engineers Inc. 2016. p. 15-16. 7799718. (ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things). doi: 10.1109/ISOCC.2016.7799718

A decouple structured gyroscope with integrated readout circuit on standard 0.18jim 1P6M CMOS Technolo

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Keywords

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