A comprehensive study on the oxidation of 4H-SiC in diluted N2O ambient
- Yuan Hung Tseng
- , Tsung Han Wu
- , Bing-Yue Tsui
- , Cheng Tyng Yen
- , Chien Chung Hung
- , Chwan Ying Lee
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations