A comprehensive study of Ge1-xSix on Ge for the Ge nMOSFETs with tensile stress, shallow junctions and reduced leakage

Guang Li Luo*, Shih Chiang Huang, Cheng Ting Chung, Dawei Heh, Chao-Hsin Chien, Chao Ching Cheng, Yao Jen Lee, Wen Fa Wu, Chiung Chih Hsu, Mei Ling Kuo, Jay Yi Yao, Mao Nan Chang, Chee Wee Liu, Chen-Ming Hu, Chun Yen Chang, Fu Liang Yang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

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Engineering

Material Science

Earth and Planetary Sciences