A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor with Temperature Compensation

Wei Xu; Shenhui Ma; Xiaoyi Wang; Yi Chiu; Yi Kuen Lee

doi:10.1109/JMEMS.2019.2928317

A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor with Temperature Compensation

Wei Xu, Shenhui Ma, Xiaoyi Wang, Yi Chiu, Yi Kuen Lee^*

^*Corresponding author for this work

Department of Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

33 Scopus citations

Abstract

In this paper, we propose a new 1D thermoresistive micro calorimetric flow (TMCF) sensor model for moist airflow with the temperature-dependent thermophysical properties. The 1D model and the corresponding proposed equivalent circuit model enable rapid design optimization of an ambient temperature-compensated TMCF (T²MCF) sensor integrated with the interface circuit by using a commercial 0.35-μ m 2P4M CMOS MEMS technology. The fabricated sensor shows a prominent sensitivity of 0.543 V/(m/s) and a low power consumption of less than 2.8 mW. Moreover, in comparison with the large drifting of 49% for the uncompensated TMCF sensor, the T²MCF sensor's output has an ultralow drifting of 0.5% with the ambient temperature variation of 22°C48°C. Therefore, this robust T²MCF sensor can be a promising Internet of Things (IoT) for smart energy-efficient buildings. [2018-0241].

Original language	English
Article number	8770247
Pages (from-to)	841-849
Number of pages	9
Journal	Journal of Microelectromechanical Systems
Volume	28
Issue number	5
DOIs	https://doi.org/10.1109/JMEMS.2019.2928317
State	Published - Oct 2019

Keywords

1D model
ambient temperature compensation
CMOS MEMS
equivalent circuit model
Micro calorimetric flow sensors
thermoresistive

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10.1109/JMEMS.2019.2928317

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@article{d5b0e9d7255c4918a56f1a4e7c7fc090,

title = "A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor with Temperature Compensation",

abstract = "In this paper, we propose a new 1D thermoresistive micro calorimetric flow (TMCF) sensor model for moist airflow with the temperature-dependent thermophysical properties. The 1D model and the corresponding proposed equivalent circuit model enable rapid design optimization of an ambient temperature-compensated TMCF (T2MCF) sensor integrated with the interface circuit by using a commercial 0.35-μ m 2P4M CMOS MEMS technology. The fabricated sensor shows a prominent sensitivity of 0.543 V/(m/s) and a low power consumption of less than 2.8 mW. Moreover, in comparison with the large drifting of 49% for the uncompensated TMCF sensor, the T2MCF sensor's output has an ultralow drifting of 0.5% with the ambient temperature variation of 22°C48°C. Therefore, this robust T2MCF sensor can be a promising Internet of Things (IoT) for smart energy-efficient buildings. [2018-0241].",

keywords = "1D model, ambient temperature compensation, CMOS MEMS, equivalent circuit model, Micro calorimetric flow sensors, thermoresistive",

author = "Wei Xu and Shenhui Ma and Xiaoyi Wang and Yi Chiu and Lee, {Yi Kuen}",

year = "2019",

month = oct,

doi = "10.1109/JMEMS.2019.2928317",

language = "English",

volume = "28",

pages = "841--849",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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TY - JOUR

T1 - A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor with Temperature Compensation

AU - Xu, Wei

AU - Ma, Shenhui

AU - Wang, Xiaoyi

AU - Chiu, Yi

AU - Lee, Yi Kuen

PY - 2019/10

Y1 - 2019/10

N2 - In this paper, we propose a new 1D thermoresistive micro calorimetric flow (TMCF) sensor model for moist airflow with the temperature-dependent thermophysical properties. The 1D model and the corresponding proposed equivalent circuit model enable rapid design optimization of an ambient temperature-compensated TMCF (T2MCF) sensor integrated with the interface circuit by using a commercial 0.35-μ m 2P4M CMOS MEMS technology. The fabricated sensor shows a prominent sensitivity of 0.543 V/(m/s) and a low power consumption of less than 2.8 mW. Moreover, in comparison with the large drifting of 49% for the uncompensated TMCF sensor, the T2MCF sensor's output has an ultralow drifting of 0.5% with the ambient temperature variation of 22°C48°C. Therefore, this robust T2MCF sensor can be a promising Internet of Things (IoT) for smart energy-efficient buildings. [2018-0241].

AB - In this paper, we propose a new 1D thermoresistive micro calorimetric flow (TMCF) sensor model for moist airflow with the temperature-dependent thermophysical properties. The 1D model and the corresponding proposed equivalent circuit model enable rapid design optimization of an ambient temperature-compensated TMCF (T2MCF) sensor integrated with the interface circuit by using a commercial 0.35-μ m 2P4M CMOS MEMS technology. The fabricated sensor shows a prominent sensitivity of 0.543 V/(m/s) and a low power consumption of less than 2.8 mW. Moreover, in comparison with the large drifting of 49% for the uncompensated TMCF sensor, the T2MCF sensor's output has an ultralow drifting of 0.5% with the ambient temperature variation of 22°C48°C. Therefore, this robust T2MCF sensor can be a promising Internet of Things (IoT) for smart energy-efficient buildings. [2018-0241].

KW - 1D model

KW - ambient temperature compensation

KW - CMOS MEMS

KW - equivalent circuit model

KW - Micro calorimetric flow sensors

KW - thermoresistive

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JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 5

M1 - 8770247

ER -

A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor with Temperature Compensation

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