A CMOS-MEMS Capacitive Pressure Sensor with Differential Sensing Electrodes and On-Chip Frequency Output Circuits

Po Wei Liao, Hao-Chiao Hong, Yi Chiu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

Abstract

This paper presents a CMOS-MEMS capacitive pressure sensor with differential sensing electrodes integrated with a low-power readout circuit in a single chip. The differential sensing electrodes are designed in the back-end-of-line (BEOL) metal and oxide stacks in a commercial 0.18 m 1P6M CMOS process. Compared with other pressure sensors with single sensing elements in the literature, the proposed differential sensing design offers the advantages of sensitivity enhancement and noise reduction. The readout circuit is a low power RC oscillator integrated with the sensor on the same chip to reduce noise and power consumption. The sensor was tested in the range of 50-300 kPa. The measurement results show the proposed sensing capacitors have a pressure sensitivity of 0.72 fF/kPa, the frequency of the readout oscillator has a sensitivity of 0.032%/kPa.

Original languageEnglish
Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages90-93
Number of pages4
ISBN (Electronic)9781665412674
DOIs
StatePublished - 20 Jun 2021
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
Duration: 20 Jun 202125 Jun 2021

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period20/06/2125/06/21

Keywords

  • CMOS-MEMS
  • differential sensing
  • Pressure sensor
  • RC oscillator
  • readout circuit

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