A capacitive vibration-to-electricity energy converter with integrated mechanical switches

Keyphrases

• Power Output 100%
• Mechanical Switch 100%
• Energy Converter 100%
• Electricity Energy 100%
• Circuit Model 33%
• Resonant Frequency 33%
• Recent Advances 33%
• Silicon-on-insulator Wafer 33%
• Charge-discharge 33%
• Electronic Devices 33%
• Etching Technology 33%
• Ambient Energy 33%
• Parasitic Capacitance 33%
• Substrate Removal 33%
• Design Technology 33%
• Low Power VLSI 33%
• Area Constraint 33%
• Device Area 33%
• Deep Silicon Etching 33%
• Saturation Voltage 33%
• Energy Conversion 33%
• Mechanical Contact 33%
• Output Saturation 33%
• Battery Supply 33%
• Contact Switch 33%
• Auxiliary Battery 33%
• Power Measurement 33%
• Discharge Energy 33%

Engineering

• Output Power 100%
• Capacitive 100%
• Mechanical Switch 100%
• Power Converter 100%
• Back Side 33%
• Silicon on Insulator 33%
• Parasitic Capacitance 33%
• Energy Conversion 33%
• Discharge Energy 33%
• Resonant Frequency 33%
• Scavenging 33%