A broadband and scalable on-chip inductor model appropriate for operation modes of varying substrate resistivities

Jyh-Chyurn Guo*, Teng Yang Tan

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    14 Scopus citations


    A broadband and scalable model is developed to accurately simulate on-chip inductors with various dimensions and substrate resistivities. The broadband accuracy is proven over frequencies of up to 20 GHz, even beyond resonance. A new scheme of resistance-inductance-capacitance networks is deployed for the spiral coils and substrate to account for 3-D eddy current, substrate return path, and spiral coil to substrate coupling effects. The 3-D eddy current is identified as the key element essential to accurately simulate the broadband characteristics. Electromagnetic simulation using the Advanced Design System momentum is conducted to predict the on-chip inductor performance corresponding to a wide range of substrate resistivities (ρSi = 0.05 -1 kΩ · cm). Three operation modes such as transverse electromagnetic mode, slow-wave mode, and eddy current mode are reproduced. The model parameters manifest themselves as physics-based through relevant correlation with ρSi over three operation modes. The onset of slow-wave mode can be consistently explained by a key element RP introduced in our model, which accounts for the conductor loss due to an eddy current arising from magnetic field coupling through a substrate return path. This broadband and scalable model is useful for radio frequency circuit simulation. In addition, it can facilitate an optimum design of on-chip inductors through the physics-based model parameters relevant to varying substrate resistivities.

    Original languageEnglish
    Pages (from-to)3018-3029
    Number of pages12
    JournalIEEE Transactions on Electron Devices
    Issue number11
    StatePublished - 1 Nov 2007


    • Broadband
    • Eddy current
    • Inductor
    • Scalable
    • Substrate resistivity


    Dive into the research topics of 'A broadband and scalable on-chip inductor model appropriate for operation modes of varying substrate resistivities'. Together they form a unique fingerprint.

    Cite this