A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring

Kelvin Yi Tse Lai; Yu Tao Yang; Bang Jing Chen; Chun Jen Shen; Ming Feng Shiu; Zih Cheng He; Hsie Chia Chang; Chen Yi Lee

doi:10.1109/ASSCC.2014.7008918

A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring

Kelvin Yi Tse Lai, Yu Tao Yang, Bang Jing Chen, Chun Jen Shen, Ming Feng Shiu, Zih Cheng He, Hsie Chia Chang, Chen Yi Lee

Institute of Electronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

An event-driven and energy-efficient humidity sensor for environment detection and healthcare monitoring is presented. A differential CMOS-MEMS humidity device and proportion-based capacitance-to-digit readout circuit are proposed to overcome PVT variations, and in the meantime to improve sensitivity, response time, and conversion energy. This chip achieves 15.6b 20-90 %RH at 1KS/s, 6.1pJ per 0.02%RH of sensitivity, and 10ms fast response time in TSMC 0.35-μm CMOS MEMS process. With variations in temperature and voltage, our proposal can minimize the errors from 40%RH to 0.2%RH and 50%RH to 0.1%RH, making it very suitable for wearable respiratory monitoring.

Original language	English
Title of host publication	2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	293-296
Number of pages	4
ISBN (Electronic)	9781479940905
DOIs	https://doi.org/10.1109/ASSCC.2014.7008918
State	Published - 13 Jan 2015
Event	2014 10th IEEE Asian Solid-State Circuits Conference, A-SSCC 2014 - Kaohsiung, Taiwan Duration: 10 Nov 2014 → 12 Nov 2014

Publication series

Name	2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers

Conference

Conference	2014 10th IEEE Asian Solid-State Circuits Conference, A-SSCC 2014
Country/Territory	Taiwan
City	Kaohsiung
Period	10/11/14 → 12/11/14

Keywords

Capacitive Sensing
Health-Care
Humidity Sensor
Low Energy
Low Power
Respiratory Monitoring

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10.1109/ASSCC.2014.7008918

Cite this

Lai, K. Y. T., Yang, Y. T., Chen, B. J., Shen, C. J., Shiu, M. F., He, Z. C., Chang, H. C., & Lee, C. Y. (2015). A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring. In 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers (pp. 293-296). Article 7008918 (2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ASSCC.2014.7008918

Lai, Kelvin Yi Tse ; Yang, Yu Tao ; Chen, Bang Jing et al. / A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring. 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 293-296 (2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers).

@inproceedings{32ea249c19a547c5baa31bd02f4fa6f7,

title = "A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring",

abstract = "An event-driven and energy-efficient humidity sensor for environment detection and healthcare monitoring is presented. A differential CMOS-MEMS humidity device and proportion-based capacitance-to-digit readout circuit are proposed to overcome PVT variations, and in the meantime to improve sensitivity, response time, and conversion energy. This chip achieves 15.6b 20-90 %RH at 1KS/s, 6.1pJ per 0.02%RH of sensitivity, and 10ms fast response time in TSMC 0.35-μm CMOS MEMS process. With variations in temperature and voltage, our proposal can minimize the errors from 40%RH to 0.2%RH and 50%RH to 0.1%RH, making it very suitable for wearable respiratory monitoring.",

keywords = "Capacitive Sensing, Health-Care, Humidity Sensor, Low Energy, Low Power, Respiratory Monitoring",

author = "Lai, {Kelvin Yi Tse} and Yang, {Yu Tao} and Chen, {Bang Jing} and Shen, {Chun Jen} and Shiu, {Ming Feng} and He, {Zih Cheng} and Chang, {Hsie Chia} and Lee, {Chen Yi}",

note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 2014 10th IEEE Asian Solid-State Circuits Conference, A-SSCC 2014 ; Conference date: 10-11-2014 Through 12-11-2014",

year = "2015",

month = jan,

day = "13",

doi = "10.1109/ASSCC.2014.7008918",

language = "English",

series = "2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers",

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pages = "293--296",

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Lai, KYT, Yang, YT, Chen, BJ, Shen, CJ, Shiu, MF, He, ZC, Chang, HC & Lee, CY 2015, A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring. in 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers., 7008918, 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers, Institute of Electrical and Electronics Engineers Inc., pp. 293-296, 2014 10th IEEE Asian Solid-State Circuits Conference, A-SSCC 2014, Kaohsiung, Taiwan, 10/11/14. https://doi.org/10.1109/ASSCC.2014.7008918

A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring. / Lai, Kelvin Yi Tse; Yang, Yu Tao; Chen, Bang Jing et al.
2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2015. p. 293-296 7008918 (2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring

AU - Lai, Kelvin Yi Tse

AU - Yang, Yu Tao

AU - Chen, Bang Jing

AU - Shen, Chun Jen

AU - Shiu, Ming Feng

AU - He, Zih Cheng

AU - Chang, Hsie Chia

AU - Lee, Chen Yi

PY - 2015/1/13

Y1 - 2015/1/13

N2 - An event-driven and energy-efficient humidity sensor for environment detection and healthcare monitoring is presented. A differential CMOS-MEMS humidity device and proportion-based capacitance-to-digit readout circuit are proposed to overcome PVT variations, and in the meantime to improve sensitivity, response time, and conversion energy. This chip achieves 15.6b 20-90 %RH at 1KS/s, 6.1pJ per 0.02%RH of sensitivity, and 10ms fast response time in TSMC 0.35-μm CMOS MEMS process. With variations in temperature and voltage, our proposal can minimize the errors from 40%RH to 0.2%RH and 50%RH to 0.1%RH, making it very suitable for wearable respiratory monitoring.

AB - An event-driven and energy-efficient humidity sensor for environment detection and healthcare monitoring is presented. A differential CMOS-MEMS humidity device and proportion-based capacitance-to-digit readout circuit are proposed to overcome PVT variations, and in the meantime to improve sensitivity, response time, and conversion energy. This chip achieves 15.6b 20-90 %RH at 1KS/s, 6.1pJ per 0.02%RH of sensitivity, and 10ms fast response time in TSMC 0.35-μm CMOS MEMS process. With variations in temperature and voltage, our proposal can minimize the errors from 40%RH to 0.2%RH and 50%RH to 0.1%RH, making it very suitable for wearable respiratory monitoring.

KW - Capacitive Sensing

KW - Health-Care

KW - Humidity Sensor

KW - Low Energy

KW - Low Power

KW - Respiratory Monitoring

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M3 - Conference contribution

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T3 - 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers

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BT - 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2014 10th IEEE Asian Solid-State Circuits Conference, A-SSCC 2014

Y2 - 10 November 2014 through 12 November 2014

ER -

Lai KYT, Yang YT, Chen BJ, Shen CJ, Shiu MF, He ZC et al. A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring. In 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2015. p. 293-296. 7008918. (2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers). doi: 10.1109/ASSCC.2014.7008918

A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring

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Keywords

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