2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage

T. Chu Duc; Gih Keong Lau; J. Wei; P. M. Sarro

doi:10.1109/MEMSYS.2007.4433168

2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage

T. Chu Duc, Gih Keong Lau, J. Wei, P. M. Sarro

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

8 Scopus citations

Abstract

This paper presents a novel 2D electro-thermal microgripper based on integrated silicon-polymer laterally stacked forward actuators. Displacements up to 8 and 13 μm along x-axis and y-axis at 2 V are measured. The microgripper is capable of rotating the clamped object both clockwise and counter-clockwise. Maximum average working temperature is 160°C.

Original language	English
Title of host publication	Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages	687-690
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2007.4433168
State	Published - 2007
Event	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan Duration: 21 Jan 2007 → 25 Jan 2007

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Country/Territory	Japan
City	Kobe
Period	21/01/07 → 25/01/07

Keywords

2d microgripper
Constrained polymer
Electro-thermal actuator
Forward actuator

Access to Document

10.1109/MEMSYS.2007.4433168

Cite this

Duc, T. C., Lau, G. K., Wei, J., & Sarro, P. M. (2007). 2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007 (pp. 687-690). Article 4433168 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2007.4433168

Duc, T. Chu ; Lau, Gih Keong ; Wei, J. et al. / 2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage. Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. pp. 687-690 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{49d6ffe32c004293a1e64ad5b5e3d037,

title = "2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage",

abstract = "This paper presents a novel 2D electro-thermal microgripper based on integrated silicon-polymer laterally stacked forward actuators. Displacements up to 8 and 13 μm along x-axis and y-axis at 2 V are measured. The microgripper is capable of rotating the clamped object both clockwise and counter-clockwise. Maximum average working temperature is 160°C.",

keywords = "2d microgripper, Constrained polymer, Electro-thermal actuator, Forward actuator",

author = "Duc, {T. Chu} and Lau, {Gih Keong} and J. Wei and Sarro, {P. M.}",

year = "2007",

doi = "10.1109/MEMSYS.2007.4433168",

language = "English",

isbn = "1424409519",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "687--690",

booktitle = "Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007",

note = "20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 ; Conference date: 21-01-2007 Through 25-01-2007",

}

Duc, TC, Lau, GK, Wei, J & Sarro, PM 2007, 2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage. in Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007., 4433168, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 687-690, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, 21/01/07. https://doi.org/10.1109/MEMSYS.2007.4433168

2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage. / Duc, T. Chu; Lau, Gih Keong; Wei, J. et al.
Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. p. 687-690 4433168 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - 2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage

AU - Duc, T. Chu

AU - Lau, Gih Keong

AU - Wei, J.

AU - Sarro, P. M.

PY - 2007

Y1 - 2007

N2 - This paper presents a novel 2D electro-thermal microgripper based on integrated silicon-polymer laterally stacked forward actuators. Displacements up to 8 and 13 μm along x-axis and y-axis at 2 V are measured. The microgripper is capable of rotating the clamped object both clockwise and counter-clockwise. Maximum average working temperature is 160°C.

AB - This paper presents a novel 2D electro-thermal microgripper based on integrated silicon-polymer laterally stacked forward actuators. Displacements up to 8 and 13 μm along x-axis and y-axis at 2 V are measured. The microgripper is capable of rotating the clamped object both clockwise and counter-clockwise. Maximum average working temperature is 160°C.

KW - 2d microgripper

KW - Constrained polymer

KW - Electro-thermal actuator

KW - Forward actuator

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DO - 10.1109/MEMSYS.2007.4433168

M3 - Conference contribution

AN - SCOPUS:52249084530

SN - 1424409519

SN - 9781424409518

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 687

EP - 690

BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007

T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007

Y2 - 21 January 2007 through 25 January 2007

ER -

Duc TC, Lau GK, Wei J, Sarro PM. 2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. p. 687-690. 4433168. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2007.4433168

2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage

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