This paper developed an active scanning probe array. The probe array consists of 16×2 probes thermally actuating and sensing. The 32 probes are integrated with Ti/Pt temperature sensors and bimorph thermal actuators. Each probe is a Si3N4 cantilever equipped with a sharp nano scale pyramid tip at its free end. When one of the probes is actuated, its neighboring probes can provide temperature sensing feedback. The temperature coefficient of resistance (TCR) of the embedded Ti/Pt sensor of each probe is 2100 ppm °C-1, and the micro thermal actuator shows good reliability after 500 cycles over specification continuous actuating test.
- Scanning Probe Microscope
- Thermal Actuator Integrated Probe Array