平整化氮化物基板的方法

@misc{5da25cd510ec43be82dc1013317c9d33,

title = "平整化氮化物基板的方法",

author = "Wei-I Lee",

year = "2016",

month = apr,

day = "13",

language = "???core.languages.zh_TW???",

type = "Patent",

note = "2020548",

}

平整化氮化物基板的方法. / Lee, Wei-I (Inventor).

Patent No.: 2020548. Apr 13, 2016.

Research output: Patent

TY - PAT

T1 - 平整化氮化物基板的方法

AU - Lee, Wei-I

PY - 2016/4/13

Y1 - 2016/4/13

M3 - Patent

M1 - 2020548

ER -

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