| Original language | Chinese (Traditional) |
|---|---|
| Patent number | I619840 |
| State | Published - 1 Apr 2018 |
化學氣相沈積裝置
Wei-Kuo Chen (Inventor)
Research output: Patent
Wei-Kuo Chen (Inventor)
Research output: Patent
| Original language | Chinese (Traditional) |
|---|---|
| Patent number | I619840 |
| State | Published - 1 Apr 2018 |