Hao-Chung Kuo (Inventor), Pei-Chen Yu (Inventor)
Research output: Patent
}
TY - PAT
T1 - 利用斜向沈積形成之奈米結構薄膜及其方法
AU - Kuo, Hao-Chung
AU - Yu, Pei-Chen
PY - 2014/10/3
Y1 - 2014/10/3
M3 - Patent
M1 - 5621955
ER -