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以高分子作為感應偶合電漿反應離子蝕刻側壁保護層以製作單晶矽懸浮微結構之快速製程平台研發
Hsu, Wen-Syang
(PI)
Department of Mechanical Engineering
Overview
Project Details
Status
Finished
Effective start/end date
1/08/11
→
31/07/12
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