Research output per year
Research output per year
Search results
-
2014
Low-temperature microwave annealing processes for future IC fabrication-A review
Lee, Y. J., Cho, T. C., Chuang, S. S., Hsueh, F. K., Lu, Y. L., Sung, P. J., Chen, H. C., Current, M. I., Tseng, T.-Y., Chao, T.-S., Hu, C.-M. & Yang, F. L., Mar 2014, In: IEEE Transactions on Electron Devices. 61, 3, p. 651-665 15 p., 6737220.Research output: Contribution to journal › Review article › peer-review
66 Scopus citations -
1998
Evaluation of plasma charging damage in ultrathin gate oxides
Lin, H.-C., Chen, C. C., Chien, C.-H., Hsein, S. K., Wang, M. F., Chao, T.-S., Huang, T. Y. & Chang, C. Y., 1 Mar 1998, In: IEEE Electron Device Letters. 19, 3, p. 68-70 3 p.Research output: Contribution to journal › Review article › peer-review
28 Scopus citations