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Personal profile

Research Interests

Physics of Semiconductor Devices, Thin Films Deposition Techniques, ULSI Technology, Deep-Submicron Devices Fabrications, Ultra-thin Oxide Preparations, Ultra-clean Processes


1992/7-2001/8 Associate Researcher / Researcher, National Nano Device Labs

2001/8-2002/1 Associate Prof., Dept. Of Electrophysics, NCTU

2002/2-present Prof., Dept. Of Electrophysics, NCTU

2009-2011 Chairman, Department of Electrophysics, NCTU, Taiwan

Education/Academic qualification

PhD, National Yang Ming Chiao Tung University

External positions


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