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沛慈 余

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Pei-Chen Yu

Professor

20012025

Research activity per year

Personal profile

Research Interests

Nanoscale Paterning technology & Material Synthesis,Optoelectronic Device Physics,Solar Cell,Optical Proximity Correction

Experience

2004/8~2006/7 LEA Design Engineer, Advanced Design, Intel Corp. Hillsoboro, Oregon USA 

2006/8~2009/7 Assistant Professor, Department of Photonics, National Chiao Tung University

2009/8~2013/7 Associate Professor, Department of Photonics, National Chiao Tung University

2013/8~ present Professor,  Department of Photonics, National Chiao Tung University

Education/Academic qualification

PhD, Electrical Engineering, University of Michigan-Ann Arbor

External positions

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Collaborations and top research areas from the last five years

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  • Practical Inverse Mask Synthesis via Data-Efficient Physics-informed Neural Networks (PINN) Model

    Wang, K. H., Fang, P. H. & Yu, P., 2025, DTCO and Computational Patterning IV. Lafferty, N. V. & Grunes, H. (eds.). SPIE, 134251R. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13425).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    1 Scopus citations

  • Quasi Phase-Only Mask (POM) for High Contrast EUV Imaging

    Fang, P. H., Chang, P., Chen, L. F., Chen, Y. L. & Yu, P., 2025, Optical and EUV Nanolithography XXXVIII. Burkhardt, M. & van Lare, C. (eds.). SPIE, 134241J. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13424).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    2 Scopus citations

  • A Novel Optical Proximity Correction Machine Learning Model Using a Single-Flow Convolutional Feedback Networks With Customized Attention

    Huang, C. H., Tung, H. C., Feng, Y. W., Hsu, H. T., Liu, H. L., Lin, A. & Yu, P., 2024, In: IEEE Access. 12, p. 165979-165991 13 p.

    Research output: Contribution to journal › Article › peer-review

    Open Access

  • Design Freeform Metagratings for Eye-glow Attenuation in Diffractive AR Waveguides

    Lin, C. E., Weng, C. W., Hu, C. C. & Yu, P., 2024, In: Digest of Technical Papers - SID International Symposium. 55, 1, p. 1567-1569 3 p.

    Research output: Contribution to journal › Conference article › peer-review

    Open Access

  • Enhancing CD-SEM Accuracy with Attention-Boosted Noise2Noise Model

    Okada, Y., Liu, H., Lee, C. E., Tien, C. H. & Yu, P., 2024, Metrology, Inspection, and Process Control XXXVIII. Sendelbach, M. J. & Schuch, N. G. (eds.). SPIE, 129552C. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12955).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    2 Scopus citations
View all 294 Research outputs
View all 6 prizes
  • 3 Invited talk