Keyphrases
3D Integration
16%
Actuation
25%
Actuator
15%
Antenna
17%
Autofluorescence
13%
Biocompatibility
13%
Carbon Nanotube Composites
10%
CMOS-MEMS
32%
Commercially Available
10%
Complementary Metal Oxide Semiconductor
10%
Composite Beam
10%
Contact Lens
19%
Dry Electrodes
12%
Epilepsy
12%
Flip-chip Bonding
11%
Gas Sensor
16%
Holographic Optical Element
17%
Image Sensor
15%
Image Stabilizer
21%
Intraocular Pressure
13%
Intraocular Pressure Monitoring
20%
MEMS Fabrication Process
11%
MEMS-based
19%
Micro-electro-mechanical Systems
37%
Micromachining
11%
Micromirror
19%
Micromirror Device
17%
Microprobe Array
14%
Microsystems
37%
Multi-walled Carbon Nanotubes (MWCNTs)
16%
Neural Sensing
42%
Optical pickup
10%
Optical pickup Head
11%
Oral Cancer Diagnosis
10%
Probe Array
15%
Residual Stress
16%
Sensing Applications
17%
Small Form Factor
22%
Smart Contact Lens
21%
Soft Contact Lens
17%
Stabilizer
11%
Systems-based
15%
Thermal Actuator
13%
Thermal Switch
16%
Three-dimensional (3D)
13%
Through Silicon via
24%
Wireless
33%
Wireless Power
12%
Wirelessly
15%
XY Stage
10%
Engineering
Actuation
25%
Actuator
51%
Amplifier
11%
Analog Front
12%
Antenna
27%
Applied Voltage
10%
Assembly Process
10%
Blue Light
9%
Bonding Wire
8%
Brain-Computer Interface
8%
Capacitive
14%
Cellphone
9%
Chip Bonding
8%
Comb Drive Actuator
14%
Complementary Metal-Oxide-Semiconductor
11%
Composite Beam
7%
Control Design
8%
Electric Power Utilization
8%
Electrostatic Driving
8%
Experimental Result
24%
Front End
17%
Gas Sensor
22%
Image Sensor
15%
Interposer
9%
Lens Sensor
12%
Loop Antenna
7%
Low-Temperature
7%
Metal Layer
8%
Micro-Electro-Mechanical System
26%
Microelectromechanical System
100%
Micromirrors
30%
Microsystem
46%
Multi-Walled Carbon Nanotube
8%
Multibody Dynamics
11%
Numerical Example
10%
Optical Element
17%
Oscillator
10%
Phase Shifters
8%
Prestress
8%
Radio Frequency Identification
10%
Residual Stress
19%
Resonant Frequency
10%
Resonator
8%
Sensing Application
17%
Sensing System
9%
Sensor System
9%
Simulation Result
11%
Sliding Mode Control
8%
Stabilizer
24%
Thin Films
8%
